Recently, perfluoro compounds (PFCs) have been widely used in a variety of industrial, commercial, and consumer applications. In Taiwan, over 300 tons per year (TPY) of PFCs are extensively used for etching silicon wafers or cleaning chambers in chemical vapor deposition processes. These compounds are excellent absorbers of infrared radiation and therefore aggravate global warming. In addition, tetrachloroethylene (C2Cl4) is widely used as a cleaner for photoelectronic industries and also recognized very toxic and carcinogentic. Thus, the main objectives were to mineralize C2Cl4 and PFCs (NF3 and SF6) using oxalates (Li2C2O4, Na2C2O4, and K2C2O4). Morphological observations, crystallinity, fine structures, oxidation states of products (e.g. sulfur) were also investigated with FE-SEM/EDS, XRD, FTIR, EXAFS/XANES techniques. Experimentally, they may also have effective destruction of C2Cl4/PFCs by the rapidly capture of F/Cl atoms with subsequent nucleation/mineralization of salts under 573-673 K in few minutes. The morphologies of oxalates were irregular shape of inorganic powders with the particle sizes of 30-50 nm. The XRD patterns of oxalates samples showed are all crystalline structures. FTIR and EDS data also showed that C2Cl4/PFCs may be mineralized completely by oxalates was decomposed to form salts, carbon, sulfur, and CO2. The main species in solid residues were S8 species having the bond distances of 1.98 Å with the coordination number of 1.15. This result indicates that SF6 may be completely mineralized and converted to elemental sulfur and salts. Moreover, the literature databases of comparision with different abatement technologies were completed. From the experimental results, the optimal operation, conversion, mechanism, basic engineering design of oxalate fluidized-bed mineralizer, and economic estimation of a bench-scale fluidized-bed mineralization reactor was also performed to confirm the decompositive effects of C2Cl4/PFCs.

Oxalate;Perfluorinated Compound;Halogenated Pollutant;Catalytic Decomposition;Mineralization;Greenhouse Effect Gases